Waferpedia

Comparison ledger

0041-39086 ESC PartversusCentura 5200 DPS

Applied Materials 0041-39086 ESC Part, Applied Materials Centura 5200 DPS, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0041-39086 ESC PartApplied Materials
Centura 5200 DPSApplied Materials
OEMApplied MaterialsApplied Materials
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run—1995–
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Applied Materials Centura 5200
Specifications
Configuration—4 Chamber[1]
Phase—3 Delta[1]
Wafer Size—8 inch[1]
Number of Chambers—4[1]
Frequency—50/60 Hz[1]
Vintage Year—1995[1]
Year—1995[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing