Comparison ledger
Applied Materials 0041-39086 ESC Part, Applied Materials DPS Metal, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0041-39086 ESC PartApplied Materials | DPS MetalApplied Materials |
|---|---|---|
| OEM | Applied Materials | Applied Materials |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Applied Materials DPS Metal |
| Specifications | ||
| Wafer size | — | 200 mm (8 inch)[1] |
| Plasma type | — | inductively coupled plasma (ICP)[2] |
| Chamber wall material | — | anodized aluminum[2] |
| Chamber dome material | — | alumina[2] |
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