Waferpedia

Comparison ledger

0041-39086 ESC Partversus9600 Dry

Applied Materials 0041-39086 ESC Part, Lam Research 9600 Dry, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0041-39086 ESC PartApplied Materials
9600 DryLam Research
OEMApplied MaterialsLam Research
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Lam Research TCP 9600
Specifications
Configuration—Missing PC and Turbo / Controller[1]
Process type—Dry Etch (Metal)[2]
Wafer size—200 mm[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]fabsurplus.comfabsurplus.com