Waferpedia

Comparison ledger

0041-39086 ESC PartversusExelan HPT

Applied Materials 0041-39086 ESC Part, Lam Research Exelan HPT, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0041-39086 ESC PartApplied Materials
Exelan HPTLam Research
OEMApplied MaterialsLam Research
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Lam Research Exelan HPT
Specifications
Wafer size supported—200 mm (8-inch)[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]link.springer.comlink.springer.com