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0242-36515 RTP XE Chamber Temperature Match KitversusSVO 9 ZZMFG Vacuum

Applied Materials 0242-36515 RTP XE Chamber Temperature Match Kit, Cascade Microtech SVO 9 ZZMFG Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
SVO 9 ZZMFG VacuumCascade Microtech
OEMApplied MaterialsCascade Microtech
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
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Family—Cascade Microtech SVO 9 ZZMFG Vacuum
Specifications
Maximum temperature—260°C[1]
Interior Dimensions—24” H x 24” D x 28” W[1]
Configuration—208/240V, 1 Ph, 50/60 Hz.[1]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing