Comparison ledger
Applied Materials 0242-36515 RTP XE Chamber Temperature Match Kit, Despatch PCO2-14, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0242-36515 RTP XE Chamber Temperature Match KitApplied Materials | PCO2-14Despatch |
|---|---|---|
| OEM | Applied Materials | Despatch |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Despatch PCO2-14 |
| Specifications | ||
| Heating | — | Electrically heated[1] |
| Designed use | — | Hard baking polyimide coatings[1] |
| Atmosphere | — | Inert atmosphere[1] |
| Clean process class | — | ISO Class 5 / Class 100 recirculated airflow[2] |
| Oxygen level | — | 20 ppm or less[2] |
| Control software | — | Protocol 3 software[2] |
| Display | — | 15 in (38.1 cm) flat panel display screen[2] |
| Chamber size | — | 25.5 x 26 x 37 in (64 x 66 x 94 cm)[3] |
| Capacity | — | 14 cu ft (396 L)[3] |
| Overall size | — | 58 x 51 x 74 in (147 x 129.5 x 188 cm)[3] |
| Max load capacity | — | 400 lbs (181 kg)[3] |
| Operating range | — | 35 C to 350 C (95 F to 662 F)[3] |
Plan your fab
Building a Thermal / Diffusion process? Get a complete equipment list.
Open the fab equipment planner →