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Comparison ledger

9500 XR Ionversus160 XP

Applied Materials 9500 XR Ion, Varian 160 XP, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
9500 XR IonApplied Materials
160 XPVarian
OEMApplied MaterialsVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials PI 9500Varian 160 XP
Cited variants—
Specifications
ConfigurationHigh Current[2]—
GasBF3, AS, P[2]—
Wafer size8 inch[2]—
Current typeHigh current[3]—
Dopant gasesBF3, AS, P[2]—
Vintage year1996[2]—
FamilyPI 9500[3]—
Configuration (160 XP Ion variant)—150mm High Current IMP[1]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com