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Reflexionversus12 Benchtop Lapping Polishing

Applied Materials Reflexion, Lapmaster 12 Benchtop Lapping Polishing, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
ReflexionApplied Materials
OEMApplied MaterialsLapmaster
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials ReflexionLapmaster 12 Benchtop Lapping Polishing
Cited variants
  • Reflexion LK[1]
  • Reflexion LK Prime[1]
—
Specifications
ConfigurationDielectric, LK Oxide[2]Ring lapper[8]
Wafer Sizes12 inch[2]—
Process TypeChemical Mechanical Polishing (CMP)[2]—
OEMApplied Materials[2]—
ModelReflexion[2]12[5]
CategoryCMP (Chemical Mechanical Polisher)[2]CMP[6]
Wafer Size12 inch[2]—
Make—Lapmaster[5]
Type/Application—Single sided[7]
Plate diameter—12 in[7]
No. of conditioning rings—3[8]
Base—Rigid, lightweight, cast aluminum base[8]
Standard RPM—60 RPM[8]
RPM range with variable speed drive—0-60[8]
Drive motor - lapper—0.5 HP[8]
Drive motor - polisher—0.75 HP[8]
Length—25 in[8]
Width—18 in[8]
Height—24 in[8]
Estimated shipping weight—240 lbs[8]
Approximate weight—135 lbs / 61 kg[9]
Approximate dimensions—24.5 in × 17.5 in × 23.8 in (622 mm × 445 mm × 607 mm)[9]
Electrical system—Various voltages; 50/60 Hz; 1 phase and 3 phase to customer specification[9]
Motor—1/3 hp / 0.25 kW motor with gear reducer[9]
Abrasive feed system—Designed for water or oil based lapping slurries[9]
Automatic cycle timer—Automatic digital cycle timer[9]
Ring configuration—Ring lapper[8]
Ring ID—4.25 inches[8]

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Sources (9)Every fact above is drawn from these public sources
  1. [1]patents.google.compatents.google.com
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]inventory listing
  5. [5]Equipment inventory listing
  6. [6]waferpedia.comwaferpedia.com
  7. [7]lapmaster-wolters.comlapmaster-wolters.com
  8. [8]catalog.lapmaster.comcatalog.lapmaster.com
  9. [9]lapmaster-wolters.comlapmaster-wolters.com