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Comparison ledger

VIISta 810 XEriversus160 XP Ion

Applied Materials VIISta 810 XEri, Varian 160 XP Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
VIISta 810 XEriApplied Materials
OEMApplied MaterialsVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials VIISta 810Varian 160 XP Ion
Specifications
ConfigurationMedium Current[1]150mm High Current IMP[2]
Wafer Size12-inch[1]—
Implant Current CategoryMedium Current[1]—
OEM—Varian[3]
Model—160 XP Ion[3]
Category—Ion Implantation[2]
Tool type—ion implanter[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing