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Comparison ledger

VIISta HC Ion Implantversus0216 7696, E 11368072 ESC

Applied Materials VIISta HC Ion Implant, Varian 0216 7696, E 11368072 ESC, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
VIISta HC Ion ImplantApplied Materials
OEMApplied MaterialsVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials VIISTAVarian 0216 7696, E 11368072 ESC
Specifications
Configuration1 channel[1]Platen ADV-S Type[2]
Channel count1 channel[1]—
Control typeSCCM type[1]—
Gas lines6 Gas lines[1]—
Vintage2005[1]—
Type—ESC Platen ADV-S Type[2]
Category—Ion Implantation[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com