Waferpedia

Comparison ledger

A 412 Annealingversus0 500

ASM A 412 Annealing, Blue M 0 500, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0 500Blue M
OEMASMBlue M
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyASM A 412 AnnealingBlue M 0 500
Specifications
ConfigurationVertical[1]—
ManufacturerASM[1]Blue M[3]
Model designationA 412[1]—
Equipment typeAnnealing Furnace[1]Oven[3]
Wafer size12 inch[1]—
CategoryThermal / Diffusion[2]—
Model—0 500[3]
Asset number—139866[3]
Last confirm date—September 10, 2025[3]

Plan your fab

Building a Thermal / Diffusion process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing