Waferpedia

Comparison ledger

17099370 Outer strike plateversus200 PCU

Axcelis 17099370 Outer strike plate, Axcelis 200 PCU, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
200 PCUAxcelis
OEMAxcelisAxcelis
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—2000 Vintage
Control system——
Generation——
FamilyAxcelis 17099370 Outer strike plateAxcelis NV GSD 200
Cited variants—
  • Fusion 200 PCU[1]
  • Fusion 200 PCU-P[2]
Specifications
ConfigurationUsed with Axcelis GSD 200[3]—
P/N—SC 4840 A[4]
Frequency—50 Hz[4]
Phase—3 Phase[4]
Voltage—400 V[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]exapro.comexapro.com
  2. [2]fabsurplus.comfabsurplus.com
  3. [3]inventory listing
  4. [4]inventory listing