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Comparison ledger

17099370 Outer strike plateversus0216 7696, E 11368072 ESC

Axcelis 17099370 Outer strike plate, Varian 0216 7696, E 11368072 ESC, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMAxcelisVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAxcelis 17099370 Outer strike plateVarian 0216 7696, E 11368072 ESC
Specifications
ConfigurationUsed with Axcelis GSD 200[1]Platen ADV-S Type[2]
Type—ESC Platen ADV-S Type[2]
Category—Ion Implantation[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com