Comparison ledger
Axcelis 200 ACU, Lam Research Rainbow 4528 I, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 ACUAxcelis | Rainbow 4528 ILam Research |
|---|---|---|
| OEM | Axcelis | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Lam Research Rainbow |
| Specifications | ||
| Configuration | Parts Machine[1] | RF Cart[5] |
| Manufacturer | Axcelis[1] | — |
| Model | 200 ACU[1] | — |
| Tool type | Asher[1] | — |
| Wafer size | 200mm[3] | 8 inch[5] |
| Serial number | AU6A356AH[3] | — |
| Computer system | M 200 PC, M 200[4] | — |
| Part number | SC 4572 A[4] | — |
| Volts | 208[4] | — |
| Amps | 30[4] | — |
| Equipment type | Asher[1] | — |
| Wafer configuration | 8 inch[2] | — |
| Software | — | Envision 1.5.2[5] |
| RF | — | Paramount 1213 / Paramount MF 3KW[5] |
| AC Box | — | 002 (breakers)[5] |
| Robot | — | Harmonic Drive[5] |
| Loader | — | Hine Indexers 38A[5] |
| Controllers | — | AC2G controller ISO THV / AC2 main chamber THV[5] |
| GAS 1 | — | Ar: 500 sccm[5] |
| GAS 2 | — | CF4: 200 sccm[5] |
| GAS 3 | — | CHF3: 100 sccm[5] |
| GAS 4 | — | SF6: 100 sccm[5] |
| GAS 5 | — | N2: 100 sccm[5] |
| GAS 6 | — | O2: 100 sccm[5] |
| GAS 7 | — | He: 1000 sccm[5] |
| GAS 8 | — | NF3: 1000 sccm[5] |
| GAS 10 | — | O2: 100 sccm[5] |
| Type | — | Plasma etcher[5] |
| RF cart | — | RF Cart[5] |
| AC Rack | — | on mezzanine[5] |
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