Comparison ledger
Axcelis 200 ACU, Tegal 9XX, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 ACUAxcelis | 9XXTegal |
|---|---|---|
| OEM | Axcelis | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Tegal 9XX |
| Cited variants | — | |
| Specifications | ||
| Configuration | Parts Machine[2] | — |
| Manufacturer | Axcelis[2] | — |
| Model | 200 ACU[2] | — |
| Tool type | Asher[2] | — |
| Wafer size | 200mm[4] | — |
| Serial number | AU6A356AH[4] | — |
| Computer system | M 200 PC, M 200[5] | — |
| Part number | SC 4572 A[5] | — |
| Volts | 208[5] | — |
| Amps | 30[5] | — |
| Equipment type | Asher[2] | — |
| Wafer configuration | 8 inch[3] | — |
| Product type | — | Series Etchers[1] |
| Base models | — | Tegal 901, Tegal 903, Tegal 915[1] |
| 901e configuration | — | Table Top, Standard[1] |
| 903e configuration | — | Table Top, Upgraded[1] |
| 903e Direct Cooled TTW variant | — | Direct Cooled TTW, Standard[1] |
| Documented technical data topics | — | Chamber Lower Electrode, Display Panel, Block Diagrams, Gas Interface PCB, Pressure Range Switch Settings, RF Control, Endpoint Filter Specifications[1] |
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