Comparison ledger
Axcelis 200 ACU, Tegal i90X, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 ACUAxcelis | i90XTegal |
|---|---|---|
| OEM | Axcelis | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | Windows NT |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Tegal i90X |
| Specifications | ||
| Configuration | Parts Machine[1] | — |
| Manufacturer | Axcelis[1] | — |
| Model | 200 ACU[1] | — |
| Tool type | Asher[1] | — |
| Wafer size | 200mm[3] | — |
| Serial number | AU6A356AH[3] | — |
| Computer system | M 200 PC, M 200[4] | — |
| Part number | SC 4572 A[4] | — |
| Volts | 208[4] | — |
| Amps | 30[4] | — |
| Equipment type | Asher[1] | — |
| Wafer configuration | 8 inch[2] | — |
| Technology | — | plasma etch technology[5] |
| Platform | — | based on the robust, production-proven platform of the 900 series[5] |
| Footprint | — | no increase in footprint[5] |
| Recipes | — | unlimited recipes[5] |
| Recipe editor | — | easy to use screen recipe editor[5] |
| Stabilization step | — | configurable, faster stabilization step[5] |
| Overetch step | — | programmable percent overetch step[5] |
| Set-point control | — | 20X fine set-point control for pressure, RF and gas flows[5] |
| Transport | — | improved, smooth, faster transport[5] |
| Stepper motors | — | high-resolution stepper motors[5] |
| Motor drivers | — | intelligent micro-stepping motor drivers[5] |
| Data logging | — | default or user-defined values and polling rates; downloadable files to disk or CD; on-screen real time and historical trending; unlimited access to every system I/O data point; additional I/O available for expansion[5] |
| User interface | — | GUI touch screen human interface; on-screen end-point trace; I/O screen read-out; on-screen alarm logging; lot and wafer ID[5] |
| Control system | — | programmed logic controller (PLC) for input/output speed and expansion; interface board connects to all existing sensors for troubleshooting and maintenance[5] |
| Control computer | — | Windows NT, Pentium II 130MB RAM, 230 MHz clock, 6GB hard drive available[5] |
| Integrated PC | — | industrial strength integrated PC/touchscreen[5] |
| Removable media | — | read-write CD and 3.5 floppy disk[5] |
| Process steps | — | Configurable, faster stabilization step; programmable percent overetch step[5] |
| Wafer transport | — | High-resolution stepper motors; intelligent micro-stepping motor drivers[5] |
| I/O control | — | Programmable logic controller (PLC) for I/O speed and expansion; interface board connects to all existing sensors[5] |
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