Comparison ledger
Axcelis 200 ACU, Tokyo Electron Tactras RLSA, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 ACUAxcelis | Tactras RLSATokyo Electron |
|---|---|---|
| OEM | Axcelis | Tokyo Electron |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Tokyo Electron Tactras RLSA |
| Specifications | ||
| Configuration | Parts Machine[1] | Oxide, Nitride, Polysilicon[5] |
| Manufacturer | Axcelis[1] | — |
| Model | 200 ACU[1] | — |
| Tool type | Asher[1] | — |
| Wafer size | 200mm[3] | — |
| Serial number | AU6A356AH[3] | — |
| Computer system | M 200 PC, M 200[4] | — |
| Part number | SC 4572 A[4] | — |
| Volts | 208[4] | — |
| Amps | 30[4] | — |
| Equipment type | Asher[1] | — |
| Wafer configuration | 8 inch[2] | — |
| Chamber Type | — | Polysilicon Dry Etch Chamber[6] |
| Wafer Size | — | 300mm[7] |
| Microwave Generator | — | Nihon Koshuha Microwave Generator, Model MKS 050B04C-OSC-V[8] |
| Turbo Pump | — | SHIMADZU FT2301D[8] |
| Top Generator | — | MKS-050B04 PS-V[8] |
| Bottom Generator | — | Daihen RGA-20C[8] |
| Gas Box Configuration | — | N2, TSA, Ar, H2, NF3, SiH4[8] |
| Chuck | — | ESC with Dual He Cooling[8] |
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