Comparison ledger
Axcelis 200 ACU, Ulvac NE 950 ICP-RIE, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 ACUAxcelis | NE 950 ICP-RIEUlvac |
|---|---|---|
| OEM | Axcelis | Ulvac |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Ulvac NE 950 |
| Specifications | ||
| Configuration | Parts Machine[1] | Gas Box:[5] |
| Manufacturer | Axcelis[1] | — |
| Model | 200 ACU[1] | — |
| Tool type | Asher[1] | — |
| Wafer size | 200mm[3] | — |
| Serial number | AU6A356AH[3] | — |
| Computer system | M 200 PC, M 200[4] | — |
| Part number | SC 4572 A[4] | — |
| Volts | 208[4] | — |
| Amps | 30[4] | — |
| Equipment type | Asher[1] | — |
| Wafer configuration | 8 inch[2] | — |
| Gas 1 Horiba STEC SEC-E40 Ar | — | 100SCCM[5] |
| Gas 2 Horiba STEC SEC-E40 O2 | — | 100SCCM[5] |
| Gas 3 Horiba STEC SEC-E40 CHF3 | — | 100SCCM[5] |
| Cooling Gas | — | MKS 649A 50SCCM[5] |
| Match Box 1 | — | AMV-1000-12.5M-CT[5] |
| Match Box 2 | — | AMV-1000-AV3[5] |
| Valve | — | MKS T3PIA 26696[5] |
| Gauge | — | MKS E28D[5] |
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