Comparison ledger
Axcelis 200 PCU, Axcelis NV GSD VHE, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 PCUAxcelis | NV GSD VHEAxcelis |
|---|---|---|
| OEM | Axcelis | Axcelis |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | Wafer tilt |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2000 Vintage | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Axcelis NV GSD VHE |
| Cited variants | — | |
| Specifications | ||
| P/N | SC 4840 A[3] | — |
| Frequency | 50 Hz[3] | — |
| Phase | 3 Phase[3] | — |
| Voltage | 400 V[3] | — |
| Wheel type | — | Full disk 17 wafers[4] |
| Wafer size | — | Wafer tilt[4] |
| Source | — | Bernas[4] |
| Extraction system | — | Triple axes[4] |
| Gases | — | Arsenic, Boron, Phosphine (SDS), all bottles removed. There is also present plumbing for one Xe bottle.[4] |
| Configuration | — | SDS Gas box[4] |
| Max implantation energy (in KeV) | — | 4.2 MeV (14 resonator configuration).[4] |
| Max Extraction voltage (in KeV) | — | 90[4] |
| Orienter type | — | flat[4] |
| Hydrogen implantation available | — | no[4] |
| PFS | — | HD[4] |
| Software version | — | 5.6[5] |
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