Comparison ledger
Blue M 0 500, Lam Research Gasonics VHP Horizontal, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0 500Blue M | Gasonics VHP HorizontalLam Research |
|---|---|---|
| OEM | Blue M | Lam Research |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Blue M 0 500 | Lam Research Gasonics |
| Specifications | ||
| Manufacturer | Blue M[1] | — |
| Model | 0 500[1] | VHP[2] |
| Asset number | 139866[1] | — |
| Last confirm date | September 10, 2025[1] | — |
| Equipment type | Oven[1] | — |
| Phase | — | 3 Phase[2] |
| Configuration | — | 80 A[2] |
| Voltage | — | 480 V[2] |
| Frequency | — | 60 Hz[2] |
| Tool type | — | Horizontal furnace[2] |
| Wafer size | — | 8 inch[3] |
| Version | — | 200 mm[4] |
| Electrical ratings | — | 3 Phase - 80 A - 480 V - 60 Hz[2] |
| OEM / Branding | — | Lam / Novellus / Gasonics[2] |
| Type | — | Horizontal Furnace[2] |
| Wafer Size (metric) | — | 200 mm[4] |
| Electrical Supply | — | 3 Phase, 480 V, 80 A, 60 Hz[2] |
| Electrical rating | — | 3 Phase, 80 A, 480 V, 60 Hz[2] |
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