Waferpedia

Comparison ledger

0 500versusATS 195 V LN 2

Blue M 0 500, Thermotron ATS 195 V LN 2, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0 500Blue M
ATS 195 V LN 2Thermotron
OEMBlue MThermotron
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlue M 0 500Thermotron ATS 195
Specifications
ManufacturerBlue M[1]Thermotron[2]
Model0 500[1]ATS 195 V LN 2[3]
Asset number139866[1]—
Last confirm dateSeptember 10, 2025[1]—
Equipment typeOven[1]Vertical Thermal Shock Chamber[4]
Configuration—Hot & Cold[2]
Category—Thermal / Diffusion[2]
LN2 capability—LN2[4]

Plan your fab

Building a Thermal / Diffusion process? Get a complete equipment list.

Open the fab equipment planner →
Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing
  4. [4]thermotron.comthermotron.com