Waferpedia

Comparison ledger

0 500versus58

Blue M 0 500, YES 58, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0 500Blue M
58YES
OEMBlue MYES
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlue M 0 500YES 58
Specifications
ManufacturerBlue M[1]YES[3]
Model0 500[1]58[2]
Asset number139866[1]—
Last confirm dateSeptember 10, 2025[1]—
Equipment typeOven[1]—
Voltage—120 VAC[2]
Configuration—50/60 Hz[2]
Category—Thermal / Diffusion[3]
Power—1700 Watts[2]
Frequency—50/60 Hz[2]
Current—14.2 A[2]
Gas—NH3 (ammonia)[4]
Process—Image reversal[4]

Plan your fab

Building a Thermal / Diffusion process? Get a complete equipment list.

Open the fab equipment planner →
Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]cnfusers.cornell.educnfusers.cornell.edu