Comparison ledger
Blue M 0 V 500, Varian HS 20 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0 V 500Blue M | HS 20 DiffusionVarian |
|---|---|---|
| OEM | Blue M | Varian |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Blue M 0 V 500 | Varian HS 20 Diffusion |
| Specifications | ||
| Model | — | HS 20[1] |
| Type | — | Diffusion pump[2] |
| Cooling method | — | Water-cooled[2] |
| Pumping speed, maximum, air | — | 17,500 l/s[3] |
| Pumping speed, maximum, helium | — | 22,000 l/s[3] |
| Inlet flange | — | 20" ASA[4] |
| Foreline flange | — | ISO63-K[4] |
| Power | — | 480 VAC, 3-Ø[4] |
| Oil capacity | — | 4.70 liters[4] |
| Weight | — | 264 kg[4] |
Plan your fab
Building a Thermal / Diffusion process? Get a complete equipment list.
Open the fab equipment planner →