Waferpedia

Comparison ledger

300 X SpinversusAct 8

Brewer Science 300 X Spin, Tokyo Electron Act 8, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
300 X SpinBrewer Science
Act 8Tokyo Electron
OEMBrewer ScienceTokyo Electron
CategoryResist ProcessingResist Processing
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrewer Science 300 X SpinTokyo Electron Act
Cited variants—
  • Act 8 Coater / Developer - Dual Block, 4 Load Port/1 Side Port - 4 Coaters - 3 Developers - 1 TCT - 14 PHP Hot Plates[1]
  • Act 8 Coater / Developer, 8" - Single[2]
  • Act 8 Coater / Developer, 8"[3]
  • Tel Act 8 Coater / Developer, 8" - Single[2]
  • Tel Act 8 Coater / Developer - Dual Block, 4 Load Port/1 Side Port - 4 Coaters - 3 Developers - 1 TCT - 14 PHP Hot Plates[1]
  • Tel Act 8 Coater / Developer, 8"[3]
Specifications
P/N901445[4]—
ConfigurationHeavy Duty Drive[4]Dual Block, 4 Load Port/1 Side Port[1]
Drive TypeHeavy Duty Drive[4]—
Voltage208-240 V[4]—
Part Number901445[4]—
Vintage—2006
Coaters & Developers Vintage—1999
Wafer Size—8 inch[7]

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Sources (7)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
  4. [4]inventory listing
  5. [5]inventory listing
  6. [6]inventory listing
  7. [7]Equipment inventory listing