Comparison ledger
Brewer Science B2, GCA 6100 C Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | B2Brewer Science | 6100 C WaferGCA |
|---|---|---|
| OEM | Brewer Science | GCA |
| Category | Lithography | Lithography |
| Wafer size | 100mm | 100mm |
| Process node | DUV | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brewer Science B2 | GCA 6100 C Wafer |
| Specifications | ||
| Type | Developable BARC[1] | — |
| Name in ACT-8 process list | B2 DUV42P[1] | — |
| Configured wafer size on ACT-8 | 100 mm (4") wafers[1] | — |
| Configuration | — | Maximus 1000 Light Source (350w)[2] |
| Wafer size | — | 100 mm AWH1 (Automatic Wafer Handler)[2] |
| Lens | — | 10X g-line (436), NA=0.28[2] |
| Equipment Rack | — | (Top Down)[2] |
| Make | — | GCA[2] |
| Model | — | 6100 C[2] |
| Category | — | Lithography[3] |
| Wafer handling | — | AWH1 (Automatic Wafer Handler)[2] |
| Stage travel | — | 150 mm X/Y stage travel[2] |
| Optics | — | 10X g-line (436), NA=0.28[2] |
| Light source | — | Maximus 1000 Light Source (350w)[2] |
| Controller | — | RZE PC Upgrade Controller (v605.1 Operating System)[2] |
| Alignment monitor | — | Alignment Monitor & PC Monitor[3] |
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