Waferpedia

Comparison ledger

017-0024-01 PrealignerversusFPA 5500 iZa MUV

Brooks 017-0024-01 Prealigner, Canon FPA 5500 iZa MUV, side by side. Every value shown is drawn from the cited encyclopedia entries.

LinkedIn X Email
Side-by-side comparison of selected equipment models
Attribute
017-0024-01 PrealignerBrooks
FPA 5500 iZa MUVCanon
OEMBrooksCanon
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—2006 Vintage year
Control system——
Generation——
FamilyBrooks 017-0024-01 PrealignerCanon FPA 5500
Specifications
Configuration—1 RBC PPC RH[1]
Power—1 W chuck[1]
Vintage—2006[2]
Wafer handling—1WH; WTC Reject Carrier[1]
Shutter—1 Shutter[1]
017-0024-01 Prealigner entryFPA 5500 iZa MUV entryAsk about these tools →Share experience with this comparison →

Plan your fab

Building a Lithography process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]inventory listing