Waferpedia

Comparison ledger

017-0024-01 PrealignerversusBA 8

Brooks 017-0024-01 Prealigner, SUSS MicroTec BA 8, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
017-0024-01 PrealignerBrooks
BA 8SUSS MicroTec
OEMBrooksSUSS MicroTec
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks 017-0024-01 PrealignerSUSS MicroTec BA 8
Cited variants—
Specifications
Phase—1+N / 2 Phase[2]
Configuration—50/60 Hz[2]
Power—1kVA[2]
017-0024-01 Prealigner entryBA 8 entryAsk about these tools →Share experience with this comparison →

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Sources (2)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]inventory listing