Comparison ledger
Brooks 017-0146-01 Prealigner, EV Group 6200 Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | 6200 MaskEV Group |
|---|---|---|
| OEM | Brooks | EV Group |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | EV Group 6200 |
| Specifications | ||
| Configuration | — | 3 Stations:[1] |
| Power | — | 1000W light source[1] |
| Manufacturer | — | EV Group[1] |
| Model | — | 6200[1] |
| Tool type | — | Mask Aligner[1] |
| Wafer sizes | — | 6, 8 inch[1] |
| Stations | — | 3 Stations[1] |
| Wafer handling | — | 6" Chuck + Mask holder; 8" Chuck + Mask holder[2] |
| Light source | — | 1000W light source[1] |
| Alignment | — | Backside alignment; top view alignment[1] |
| Optics | — | 5x[1] |
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