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017-0146-01 PrealignerversusNSR 2005 i 10 C i-Line

Brooks 017-0146-01 Prealigner, Nikon NSR 2005 i 10 C i-Line, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
017-0146-01 PrealignerBrooks
NSR 2005 i 10 C i-LineNikon
OEMBrooksNikon
CategoryLithographyLithography
Wafer size—No wafer handler
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks 017-0146-01 PrealignerNikon NSR 2005
Specifications
Handler Type—SiC Handling[1]
Configuration—Cassette Stage[1]
Handler Options—SiC Substrate[1]
OS Version—Nikon Nest[1]
CDA—N2[1]
DIW—Chilled Water[1]
Power—208, 3 Phase[1]
Wafer size—No wafer handler[1]
017-0146-01 Prealigner entryNSR 2005 i 10 C i-Line entryAsk about these tools →Share experience with this comparison →

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing