Comparison ledger
Brooks 017-0146-01 Prealigner, Nikon NSR 2205 i 11 D i-Line, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | |
|---|---|---|
| OEM | Brooks | Nikon |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | Nikon NSR 2205 |
| Specifications | ||
| Configuration | — | With HDD & Software[1] |
| Lamp Power | — | 570.2 mW / cm2[1] |
| Uniformity | — | 1.17%[1] |
| TFD | — | 0.410 µm[1] |
| Astigmatism | — | 0.328 µm[1] |
| Make | — | Nikon[2] |
| Model | — | NSR 2205 i 11 D[2] |
| Type | — | i-line stepper[2] |
| Wafer size | — | 4 inch[2] |
| Vintage | — | 1995[2] |
| Included accessories | — | HDD and software[1] |
| Stepping 3 sigma X | — | 17 nm[1] |
| Stepping 3 sigma Y | — | 20 nm[1] |
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