Comparison ledger
Brooks 017-0146-01 Prealigner, Nikon NSR-2205i11D, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | NSR-2205i11DNikon |
|---|---|---|
| OEM | Brooks | Nikon |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | 0.35 micron |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | Nikon NSR-2205i11D |
| Specifications | ||
| Tool type | — | Step-and-Repeat System[1] |
| Process node | — | 0.35 micron[1] |
| Node | — | 0.35 micron[1] |
| Technology Node | — | 0.35 micron[1] |
| Type | — | Step-and-repeat system[1] |
| Resolution node | — | 0.35 micron[1] |
| Machine type | — | Step-and-Repeat System[1] |
| Target design node | — | 0.35 micron[1] |
| System type | — | Step-and-repeat system[1] |
| Target node | — | 0.35 micron[1] |
| Design node | — | 0.35 micron[1] |
| Node (resolution) | — | 0.35 micron[1] |
| Resolution | — | 0.35 micron[1] |
| Minimum feature size | — | 0.35 μm[1] |
| Design Rule | — | 0.35 micron[1] |
| Feature Size | — | 0.35 micron[1] |
| Description | — | State-of-the-art workhorse[1] |
| Equipment type | — | Step-and-repeat system[1] |
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