Comparison ledger
Brooks 017-0146-01 Prealigner, Nikon NSR S 205 C, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | NSR S 205 CNikon |
|---|---|---|
| OEM | Brooks | Nikon |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | Nikon NSR |
| Specifications | ||
| Configuration | — | 248nm (KrF)[1] |
| Type | — | Scanner[1] |
| Wavelength | — | 248 nm (KrF)[1] |
| Numerical Aperture | — | 0.75[2] |
| Minimum Feature Size | — | 0.13 µm[2] |
| Overlay Accuracy | — | < 30 nm[2] |
| Throughput (200 mm) | — | 140-200 wafers per hour[2] |
| Throughput (300 mm) | — | 84 wafers per hour[2] |
| Exposure Field | — | 25 mm × 33 mm[2] |
| Reduction Ratio | — | 4:1[2] |
| Wafer Sizes Supported | — | 200 mm and 300 mm (field-upgradable)[2] |
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