Comparison ledger
Brooks 017-0146-01 Prealigner, Nikon SF 130, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | SF 130Nikon |
|---|---|---|
| OEM | Brooks | Nikon |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | Nikon SF 130 |
| Specifications | ||
| Operating System | — | Windows[1] |
| Configuration | — | With:[1] |
| Manufacturer | — | Nikon[1] |
| Model | — | SF 130[1] |
| Category | — | Lithography[2] |
| Light Source | — | i-line mercury lamp (365 nm wavelength)[3] |
| Exposure Wavelength | — | 365 nm[4] |
| Max Wafer Size | — | 200 mm[4] |
| Numerical Aperture | — | ~0.50[4] |
| Throughput | — | about 100 wafers per hour[4] |
| Common Process Node | — | ≥ 0.25 μm[4] |
| Tool type | — | lithography stepper[2] |
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