Comparison ledger
Brooks 017-0146-01 Prealigner, SUSS MicroTec MJB 3 350 W Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | MJB 3 350 W MaskSUSS MicroTec |
|---|---|---|
| OEM | Brooks | SUSS MicroTec |
| Category | Lithography | Lithography |
| Wafer size | — | Wafer Equipment |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | SUSS MicroTec MJB3 350W Mask |
| Specifications | ||
| Wafer size | — | Wafer Equipment[1] |
| - Model | — | MJB3 Main System[1] |
| - Manufacturer | — | Suss MicroTec / Karl Suss[1] |
| - Max Wafer Size | — | 3" Diameter[1] |
| - Eyepieces | — | 10x[1] |
| - Objectives | — | 3.5x and 10x[1] |
| - Exposure Mode | — | Vacuum Contact, Hard & Soft[1] |
| - Exposure Resolution | — | 0.8 Microns (under optimum conditions)[1] |
| - Alignment Resolution | — | 0.25um (operator dependant)[1] |
| Wafer Sizes | — | 3 inch[2] |
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