Comparison ledger
Brooks 017-0146-01 Prealigner, SVG 661 HT, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | 661 HTSVG |
|---|---|---|
| OEM | Brooks | SVG |
| Category | Lithography | Lithography |
| Wafer size | — | Mask / Wafer Handling: |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | SVG 661 HT |
| Specifications | ||
| Configuration | — | Refurbished in 2022[1] |
| Process | — | Photo Exposure[1] |
| Heat Exchanger / Chiller | — | Blower[1] |
| Wafer size | — | Mask / Wafer Handling:[1] |
| OEM | — | SVG[1] |
| Model | — | 661 HT[1] |
| Equipment type | — | Aligner[1] |
| Category | — | Lithography[2] |
| Optics | — | High Throughput Coated Optics (HT)[1] |
| Performance | — | Integrated Uniformity Tester[1] |
| Software | — | OS 2000 Hardware and Software v29.x or Higher[1] |
| Host link | — | SEMI-GEM E 30 & HSMS # 37 Compliant Host Link[1] |
| Chamber Type | — | M 500 / 600[1] |
| Cassette Stage | — | 150 mm no smf[1] |
| Wafer Mapping | — | Optical Sensor[1] |
| Control System | — | OS 2000[1] |
| Air Cooler | — | 39,000 BTU 220 Vac 3 Ф[1] |
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