Waferpedia

Comparison ledger

100 Spinversus1 EC 101 R 485 Photoresist Spinner

CEE 100 Spin, Headway 1 EC 101 R 485 Photoresist Spinner, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMCEEHeadway
CategoryResist ProcessingResist Processing
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCEE 100Headway 1 EC 101 R 485 Photoresist Spinner
Specifications
ConfigurationVolts 115[1]—
Vacuum requirement—23" Hg[2]
Electrical—115 V, 3 A, 50/60 Hz, 1 Ø (single phase)[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing