Waferpedia

Comparison ledger

1000 Hot Plateversus1100 FX Hot Plate

CEE 1000 Hot Plate, CEE 1100 FX Hot Plate, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMCEECEE
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCEE 1000 Hot PlateCEE 1100
Specifications
Configuration4"[1]300 degrees C maximum bake temperature[2]
TypeHot Plate[1]—
Wafer Size4 inch[1]—
Substrate size—150 to 300mm[2]
Voltage—240V, 1Ph, 60Hz[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing