Comparison ledger
CEE 1000 Hot Plate, Mattson SHS 2800 RTA, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SHS 2800 RTAMattson | |
|---|---|---|
| OEM | CEE | Mattson |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | CEE 1000 Hot Plate | Mattson SHS 2800 RTA |
| Specifications | ||
| Configuration | 4"[1] | Front End[2] |
| Type | Hot Plate[1] | — |
| Wafer Size | 4 inch[1] | — |
| Process | — | Oxid (BPSG + RTP)[2] |
| Voltage | — | 380 V, 63.0 A, 50/60 Hz, 3 Phase[2] |
Plan your fab
Building a Thermal / Diffusion process? Get a complete equipment list.
Open the fab equipment planner →