Waferpedia

Comparison ledger

3220versusDicing

Disco 3220, Disco Dicing, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
3220Disco
DicingDisco
OEMDiscoDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDisco 3220Disco Dicing
Cited variants—
Specifications
equipment typedicing saw[2]—
Workplace sizeø150 mm[3]—
Spindle layoutSingle[3]—
Spindle output1.5 kW at 30,000 min-1[3]—
Spindle max revolution speed40,000 min-1[3]—
X-axis feed speed range0.1 – 500 mm/s[3]—
Y-axis index step0.0001 mm[3]—
Z-axis repeating accuracy0.001 mm[3]—
Z-axis max blade sizeø58 mm[3]—
Configuration—Parts Tool[4]
Substrate size—up to 8 inches[5]
Substrate thickness—up to 1.25 mm[5]
Spindle—2” front-mount, air driven DC brushless, closed-loop control[5]
Y-axis—closed-loop linear encoder[5]
Height sensing—non-contact optical[5]
Pattern recognition—auto-focusing and programmable illumination[5]
Equipment type—Dicing saw[4]
Model—-[4]
Maximum substrate thickness—up to 1.25 mm[5]
Applications—dicing of silicon, bonded Si wafers, and all types of glasses[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]ece.utoronto.caece.utoronto.ca
  2. [2]nanofab.utah.edunanofab.utah.edu
  3. [3]semistarcorp.comsemistarcorp.com
  4. [4]inventory listing
  5. [5]cnfusers.cornell.educnfusers.cornell.edu