Waferpedia

Comparison ledger

dad3240-dicing-sawversusDFL7340-stealth-dicer

Disco dad3240-dicing-saw, Disco DFL7340-stealth-dicer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMDiscoDisco
CategoryPackaging & BondingPackaging & Bonding
Wafer size200mm200mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDisco dad3240-dicing-sawDisco DFL7340-stealth-dicer
Specifications
vendorDisco[1]—
modelDFL7340[1]—
process areaPackaging[1]—
compatible materialsSi wafers only[1]—
engineSDE03 engine with λ = 1342 nm[1]—
maximum sample diameter200 mm[1]—
dicing orientationTopside or backside (through tape) dicing possible[1]—
OEM—Disco[1]
Model—DFL7340[1]
Process area—Packaging[1]
Compatible materials—Dedicated to dicing Si wafers only[1]
Laser engine wavelength—λ = 1342 nm[1]
Maximum sample diameter—200 mm[1]
Dicing orientation—Topside or backside (through tape) dicing possible[1]
Si resistivity requirement—ρ > 0.01 Ω•cm[1]
Surface roughness requirement—Dicing streets must be smooth (mirror polish) on the surface where the laser is incident[1]
Street clearance requirement—Wafer must be metal-free in a width 0.4 × substrate thickness, centred on the dicing street[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]confluence.nanofab.ualberta.caconfluence.nanofab.ualberta.ca