Waferpedia

Comparison ledger

DFD 6362versus15

Disco DFD 6362, Lapmaster 15, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
15Lapmaster
OEMDiscoLapmaster
CategoryDicing & GrindingDicing & Grinding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDisco DFD 6362Lapmaster 15
Specifications
Max workpiece sizeΦ300 mm[1]—
X-axis cutting range310 mm[1]—
Cutting speed0.1 – 1000 mm/s[1]—
Y1/Y2 cutting range310 mm[1]—
Index step0.0001 mm[1]—
Positioning accuracy (X axis)Within 0.002 mm / 310 mm (Single error)[1]—
Z-axis max stroke14.7 mm (for Φ2 inch blade); 14.9 mm (for Φ3 inch blade)[1]—
θ-axis max rotating angle380 deg[1]—
Spindle rated torque (1.2 kW / high-speed rotation)0.19 N·m[1]—
Spindle rotation speed range (1.2 kW / 1.8 kW)6,000 – 60,000 min⁻¹[1]—
Spindle rotation speed range (high-speed rotation)20,000 – 80,000 min⁻¹[1]—
Equipment dimensions (W×D×H)1,200 × 1,550 × 1,800 mm[1]—
Equipment weightApprox. 2,050 kg[1]—
Power supply phase3 Phase[2]—
Power frequency50/60 Hz[2]—
Voltage range308 – 415 VAC ±10%, 3 Phase[2]—
Full load current9 A[2]—
Machine main breaker rating20 A[2]—
Standard spindle power1.2 kW[3]—
Optional spindle powers1.8 kW or 2.2 kW[3]—
Wafer size300 mm[3]—
Vintage2010[3]—
Serial numberNL1049[3]—
Cassette typeDual-stack cassette handler for 300 mm[3]—
BCR systemYes[3]—
Touch screen displayYes[3]—
Automatic wheel coversYes[3]—
Air ionizerYes[3]—
Input Power—110 Vac[4]
Plate Diameter—15 inches (381 mm)[5]
Number of Conditioning Rings—3[5]
Ring ID—5.5 inches (140 mm)[5]
Standard RPM—60[5]
RPM Range (Variable Speed Drive)—0-60[5]
Drive Motor - Lapper—0.5 HP (0.37 kW)[5]
Drive Motor - Polisher—0.75 HP (0.56 kW)[5]
Length—25 inches (635 mm)[5]
Width—20 inches (508 mm)[5]
Height—24 inches (610 mm)[5]
Estimated Shipping Weight—285 lbs (129.3 kg)[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]disco.com.sgdisco.com.sg
  2. [2]waferpedia.comwaferpedia.com
  3. [3]agsemiconductor.comagsemiconductor.com
  4. [4]inventory listing
  5. [5]web.archive.orgweb.archive.org