Waferpedia

Comparison ledger

EG4versus1007

Electroglas EG4, KLA 1007, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
EG4Electroglas
1007KLA
OEMElectroglasKLA
CategoryTest & ProbeTest & Probe
Wafer size200mm—
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyElectroglas EG4KLA 1007
Cited variants—
Specifications
Typewafer prober[2]—
Wafer size200mm[2]150 mm[3]
Z-forceup to 150 kilograms[2]—
Z-driveprobe-centered Z-drive[2]—
Z-drive typeProbe centered Z-drive[2]—
Manufacturer—KLA[3]
Model—1007[3]
Description—Wafer Prober[3]
Convertible to 8 inch wafer size—Yes[3]
Vintage—01.06.1995[3]
Make—KLA[4]
Equipment type—Prober[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]web.archive.orgweb.archive.org
  3. [3]fabsurplus.comfabsurplus.com
  4. [4]Equipment inventory listing