Waferpedia

Comparison ledger

510versus1 WBS 1 Wafer Substrate

EV Group 510, Logitech 1 WBS 1 Wafer Substrate, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
510EV Group
OEMEV GroupLogitech
CategoryPackaging & BondingPackaging & Bonding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyEV Group 510Logitech 1 WBS 1 Wafer Substrate
Specifications
Configuration230 / 400 V[1]—
Power Consumption13,2 kW[1]—
Full Load Current Rating24,7 A[1]—
Largest Current Rating24,7 A[1]—
Vacuum PumpEdwards nXD 56 i Scroll Pump[1]—
Wafer Size—6 inch[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing