Waferpedia

Comparison ledger

3806 Lversus6 DF DC 1

GigaMat 3806 L, Strasbaugh 6 DF DC 1, side by side. Every value shown is drawn from the cited encyclopedia entries.

Documented as functional equivalents— Same function class: CMP, Unknown[1]
Side-by-side comparison of selected equipment models
Attribute
3806 LGigaMat
6 DF DC 1Strasbaugh
OEMGigaMatStrasbaugh
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyGigaMat 3806 LStrasbaugh 6 DF DC 1
Specifications
ConfigurationWith Water Jet[1]Refurbished[2]
Voltage480 VAC[1]230 V, Single Phase, 60 Hz[2]
Frequency60 Hz[1]—
Full Load—15 A[2]
Motor—8.0 A[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing