Comparison ledger
Heller 1088, Thermco 5200 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1088Heller | 5200 DiffusionThermco |
|---|---|---|
| OEM | Heller | Thermco |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Heller 1088 | Thermco 5200 Diffusion |
| Specifications | ||
| Heating Zones | 8 zones (4 top and 4 below) plus 1 cooling zone[1] | — |
| Heating Method | Forced convection[1] | — |
| Conveyor Width | 18 inches (45 cm)[1] | — |
| Heated Length | 43.5 inches (111 cm)[1] | — |
| Overall Length | 96 inches (244 cm)[1] | — |
| Height | 50 inches (127 cm)[1] | — |
| Net Weight | 900 lbs (409 kg)[1] | — |
| Thermal Profiler | Included[1] | — |
| Oven Top | Counter balance for easy access to conveyor[1] | — |
| Solder Compatibility | Lead-free and leaded soldering[1] | — |
| Configuration | — | Boron[2] |
| Make | — | Thermco[3] |
| Model | — | 5200[3] |
| Wafer size | — | 6 inch[3] |
| Process chambers | — | Two to four-process chamber systems[4] |
| Substrate diameter | — | Up to 150 mm[4] |
| Applications | — | Semiconductor, PV, LED, Nano, and MEMS substrates[4] |
| Control system | — | Thermco TMX controller[4] |
| Heating zones | — | 3 independently controlled heating zones[4] |
| Operating temperature range | — | 200°C to 1350°C[4] |
| Flatzone | — | 1,100 mm[4] |
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