Waferpedia

Comparison ledger

1088versusAlpha 303 i

Heller 1088, Tokyo Electron Alpha 303 i, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1088Heller
Alpha 303 iTokyo Electron
OEMHellerTokyo Electron
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHeller 1088Tokyo Electron Alpha 303
Cited variants—
Specifications
Heating Zones8 zones (4 top and 4 below) plus 1 cooling zone[2]—
Heating MethodForced convection[2]—
Conveyor Width18 inches (45 cm)[2]—
Heated Length43.5 inches (111 cm)[2]—
Overall Length96 inches (244 cm)[2]—
Height50 inches (127 cm)[2]—
Net Weight900 lbs (409 kg)[2]—
Thermal ProfilerIncluded[2]—
Oven TopCounter balance for easy access to conveyor[2]—
Solder CompatibilityLead-free and leaded soldering[2]—
Configuration—K type / Mto[3]
Type—Furnace[3]
Process applications—Anneal, PIQ, D-Poly, NIT, Alloy[4]
Process type—Nitride[1]
Vintage year—2005[3]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]smtdevices.comsmtdevices.com
  3. [3]inventory listing
  4. [4]inventory listing