Waferpedia

Comparison ledger

1088versusAlpha 8 SE Vertical

Heller 1088, Tokyo Electron Alpha 8 SE Vertical, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1088Heller
Alpha 8 SE VerticalTokyo Electron
OEMHellerTokyo Electron
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHeller 1088Tokyo Electron Alpha
Cited variants—
  • Alpha 8 SE Vertical Furnace, 8" TEOS[1]
  • Alpha 8 SE Vertical Furnace, 8" Poly[2]
  • Alpha 8 SE Vertical Furnace, 8" Oxide[3]
  • Alpha 8 SE Vertical Furnace, 8" Nitride[4]
  • Alpha 8 SE Vertical Furnace, 8" Doped Poly[5]
Specifications
Heating Zones8 zones (4 top and 4 below) plus 1 cooling zone[6]—
Heating MethodForced convection[6]—
Conveyor Width18 inches (45 cm)[6]—
Heated Length43.5 inches (111 cm)[6]—
Overall Length96 inches (244 cm)[6]—
Height50 inches (127 cm)[6]—
Net Weight900 lbs (409 kg)[6]—
Thermal ProfilerIncluded[6]—
Oven TopCounter balance for easy access to conveyor[6]—
Solder CompatibilityLead-free and leaded soldering[6]—
Configuration—TEOS[1]
Wafer Size—8 inch[1]

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Sources (7)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
  4. [4]Equipment inventory listing
  5. [5]Equipment inventory listing
  6. [6]smtdevices.comsmtdevices.com
  7. [7]inventory listing