Comparison ledger
Hitachi 1305 BSG 3, Ontrak DSS 200 Integrated Circuit, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1305 BSG 3Hitachi | |
|---|---|---|
| OEM | Hitachi | Ontrak |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 1305 BSG 3 | Ontrak DSS 200 Integrated Circuit |
| Cited variants | — | |
| Specifications | ||
| Wafer size range | — | 100mm to 200mm[1] |
| Throughput | — | 45-65 wafers per hour[2] |
| Cleaning method | — | Double-sided PVA scrub[1] |
| Brush type | — | Roller PVA[3] |
| Drying method | — | Spin dry with heat lamp[1] |
| Control system | — | Windows-based[3] |
| Brush boxes | — | Dual[1] |
| Ammonia dispense | — | Yes[1] |
| Robotic unload | — | Yes[1] |
| Touchscreen controls | — | Yes[1] |
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