Comparison ledger
Hitachi 1305 BSG 3, Proton H Series Hydrogen, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1305 BSG 3Hitachi | H Series HydrogenProton |
|---|---|---|
| OEM | Hitachi | Proton |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 2019 Manufacturer upgrade |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 1305 BSG 3 | Proton H Series Hydrogen |
| Specifications | ||
| Configuration | — | 3 HOGEN[1] |
| Flow rate (upgraded) | — | 6 Nm³/hr[1] |
| Original flow rate | — | 2 Nm³/hr[1] |
| Upgrade year | — | 2019[1] |
| Operation time (this unit) | — | Approximately 18000 hours[1] |
| Type designation | — | HOGEN[1] |
| Equipment type | — | Hydrogen generator[1] |
| Application | — | Wet processing / clean[2] |
| Upgrade | — | Upgraded by manufacturer in 2019 from 2 Nm/hr to 6 nM/hr, with retrofit power supply update[1] |
| Operation time | — | Approximately 18000 hrs[1] |
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