Waferpedia

Comparison ledger

S 3000versus.498 PSL Wafer

Hitachi S 3000, KLA .498 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
S 3000Hitachi
.498 PSL WaferKLA
OEMHitachiKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHitachi S 3000KLA .498 PSL Wafer
Specifications
Equipment typeScanning Electron Microscope (SEM)[1]—
MakeHitachi[1]—
ModelS 3000[1]—
Configuration—NIST Traceable[2]
NIST traceability—Yes[2]
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Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing